Laser Source for Interferometry in Nanometrology

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00352194" target="_blank" >RIV/68081731:_____/10:00352194 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Laser Source for Interferometry in Nanometrology
Original language description
The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. We have decided for a frequency-doubled Nd:YAG laser with thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique isdescribed together with comparison of frequency stability.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications
ISBN
978-0-9867183-0-4
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
International ASET
Place of publication
Ottawa
Event location
Ottawa
Event date
Aug 4, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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