Laser source for interferometry in nanotechnology

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00352207" target="_blank" >RIV/68081731:_____/10:00352207 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Laser source for interferometry in nanotechnology
Original language description
The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary etalon. This leads to the engagement of laser interferometric measuring methods. We present a design of a single-frequency stabilized laser which serves as a laser source for multiaxis position control of a nanopositioning stage. The laser stabilization technique is described together with comparison of frequency stability.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proceedings of SPIE Vol. 7746)
ISBN
978-0-8194-8236-5
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
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Publisher name
SPIE
Place of publication
Bellingham
Event location
Liptovsky Jan
Event date
Sep 6, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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