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Nanometrology Interferometric System for Local Probe Microscopy

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F11%3A00368141" target="_blank" >RIV/68081731:_____/11:00368141 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Nanometrology Interferometric System for Local Probe Microscopy

  • Original language description

    This work deals with the measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. We present a new design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The measurement tool is powered by solid-state frequency-doubled Nd:YAG laser stabilized by linear absorption spectroscopy with the help of a new type of iodine absorption cell based on borosilicate glass material.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2011

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of the 20th IMEKO TC2 Symposium on Photonics in Measurement

  • ISBN

    978-3-8440-0058-0

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    17-20

  • Publisher name

    Shaker Verlag

  • Place of publication

    Aachen

  • Event location

    Linz

  • Event date

    May 16, 2011

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article