Nanometrology Interferometric System for Local Probe Microscopy
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F11%3A00368141" target="_blank" >RIV/68081731:_____/11:00368141 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Nanometrology Interferometric System for Local Probe Microscopy
Original language description
This work deals with the measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. We present a new design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The measurement tool is powered by solid-state frequency-doubled Nd:YAG laser stabilized by linear absorption spectroscopy with the help of a new type of iodine absorption cell based on borosilicate glass material.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 20th IMEKO TC2 Symposium on Photonics in Measurement
ISBN
978-3-8440-0058-0
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
17-20
Publisher name
Shaker Verlag
Place of publication
Aachen
Event location
Linz
Event date
May 16, 2011
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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