Multidimensional interferometric tool for the local probe microscopy nanometrology

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F11%3A00366031" target="_blank" >RIV/68081731:_____/11:00366031 - isvavai.cz</a>
Alternative codes found
RIV/00177016:_____/11:#0000382
Result on the web
<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094030" target="_blank" >http://dx.doi.org/10.1088/0957-0233/22/9/094030</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094030" target="_blank" >10.1088/0957-0233/22/9/094030</a>

Result language
angličtina
Original language name
Multidimensional interferometric tool for the local probe microscopy nanometrology
Original language description
This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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