AFM nanometrology interferometric system with the compensation of angle errors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F11%3A00367516" target="_blank" >RIV/68081731:_____/11:00367516 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.889544" target="_blank" >http://dx.doi.org/10.1117/12.889544</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.889544" target="_blank" >10.1117/12.889544</a>
Alternative languages
Result language
angličtina
Original language name
AFM nanometrology interferometric system with the compensation of angle errors
Original language description
The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary standard. This leads to the engagement of laser interferometric measuring methods. We present a improved design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The setup is powered with the help of a single-frequency frequency-doubled Nd:YAG laser which is stabilized by thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability and angle errors compensation system performance.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Optical Measurement Systems for Industrial Inspection VII (Proceedings of SPIE Vol. 8082)
ISBN
978-0-8194-8678-3
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
"80823U:1"-"6"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Munich
Event date
May 23, 2011
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000295076900133