Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F11%3A00358594" target="_blank" >RIV/68081731:_____/11:00358594 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.nima.2010.12.232" target="_blank" >http://dx.doi.org/10.1016/j.nima.2010.12.232</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nima.2010.12.232" target="_blank" >10.1016/j.nima.2010.12.232</a>

Result language

angličtina

Original language name

Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens

Original language description

The cathode lens is an electron optical element in an emission electron microscope accelerating electrons from the sample, which serves as a source for a beam of electrons. Special application consists in using the cathode lens first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons, made in the directly imaging low energy electron microscope or in its scanning version discussed here. In order to form a real image, the cathode lens hasto be combined with a focusing magnetic lens or a focusing immersion-magnetic lens, as used for objective lenses of some commercial scanning electron microscopes. These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients and the spot size, as well as the optimum angular aperture of the primary beam. The important role of the final aperture size on the image resolution is also presented.

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

—

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2011

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Nuclear Instruments & Methods in Physics Research Section A

ISSN

0168-9002

e-ISSN

—

Volume of the periodical

645

Issue of the periodical within the volume

1

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

5

Pages from-to

55-59

UT code for WoS article

000292713900012

EID of the result in the Scopus database

—