Electron optical properties of a focusing magnetic/immersion-magnetic lens combined with a cathode lens

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F11%3A00367278" target="_blank" >RIV/68081731:_____/11:00367278 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Electron optical properties of a focusing magnetic/immersion-magnetic lens combined with a cathode lens
Original language description
The cathode lens (CL) is an electron optical element used in emission electron microscopes. Special application is in the scanning low energy electron microscope (SLEEM. The CL is using first for retardation of an illuminating electron beam and then foracceleration of reflected as well as secondary electrons. The cathode lens has to be combined with a focusing magnetic lens (sequential fields) or a focusing immersion-magnetic lens (overlapped fields). These two alternatives are compared with regards totheir optical properties, in particular with respect to predicted aberration coefficients (CS, CC) and the spot size, the optimum angular aperture of the primary beam, as well as maximum primary beam current for each system.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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