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SEM characterization of carbon nanotubes based active layers of chemical sensors

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00435575" target="_blank" >RIV/68081731:_____/14:00435575 - isvavai.cz</a>

  • Alternative codes found

    RIV/00216305:26220/14:PU110668

  • Result on the web

    <a href="http://dx.doi.org/10.1109/ISSE.2014.6887625" target="_blank" >http://dx.doi.org/10.1109/ISSE.2014.6887625</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1109/ISSE.2014.6887625" target="_blank" >10.1109/ISSE.2014.6887625</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    SEM characterization of carbon nanotubes based active layers of chemical sensors

  • Original language description

    Characterization method for active layers for microelectrodes of electrochemical and gas sensors using scanning electron microscopy (SEM) is presented. In order to achieve maximum sensitivity and selectivity of the sensor, it is necessary to obtain precise knowledge of electrode's surface. Characterization was made using FEI Magellan SEM equipped with TLD secondary electron (SE) and CBS back-scattered electron (BSE) detectors, Energy-dispersive X-ray spectroscopy (EDS) and beam deceleration system. SEMat lower energies offers several advantages, among them the most important are: increase of material contrast, high ratio SE, BSE signal and noise, smaller interaction volume and elimination of charging effects.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    JA - Electronics and optoelectronics

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of the ISSE 2014. 37th International Spring Seminar on Electronics Technology

  • ISBN

    978-1-4799-4455-2

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    361-364

  • Publisher name

    IEEE

  • Place of publication

    Piscataway

  • Event location

    Dresden

  • Event date

    May 7, 2014

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article

    000346580500072