SEM characterization of carbon nanotubes based active layers of chemical sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00435575" target="_blank" >RIV/68081731:_____/14:00435575 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26220/14:PU110668
Result on the web
<a href="http://dx.doi.org/10.1109/ISSE.2014.6887625" target="_blank" >http://dx.doi.org/10.1109/ISSE.2014.6887625</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ISSE.2014.6887625" target="_blank" >10.1109/ISSE.2014.6887625</a>
Alternative languages
Result language
angličtina
Original language name
SEM characterization of carbon nanotubes based active layers of chemical sensors
Original language description
Characterization method for active layers for microelectrodes of electrochemical and gas sensors using scanning electron microscopy (SEM) is presented. In order to achieve maximum sensitivity and selectivity of the sensor, it is necessary to obtain precise knowledge of electrode's surface. Characterization was made using FEI Magellan SEM equipped with TLD secondary electron (SE) and CBS back-scattered electron (BSE) detectors, Energy-dispersive X-ray spectroscopy (EDS) and beam deceleration system. SEMat lower energies offers several advantages, among them the most important are: increase of material contrast, high ratio SE, BSE signal and noise, smaller interaction volume and elimination of charging effects.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the ISSE 2014. 37th International Spring Seminar on Electronics Technology
ISBN
978-1-4799-4455-2
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
361-364
Publisher name
IEEE
Place of publication
Piscataway
Event location
Dresden
Event date
May 7, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000346580500072