Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F20%3A00525645" target="_blank" >RIV/68081731:_____/20:00525645 - isvavai.cz</a>

Alternative codes found

RIV/00216305:26620/20:PU135027

Result on the web

<a href="https://www.mdpi.com/2072-666X/11/2/143" target="_blank" >https://www.mdpi.com/2072-666X/11/2/143</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/mi11020143" target="_blank" >10.3390/mi11020143</a>

Result language

angličtina

Original language name

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

Original language description

In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d(33) of (7.33 +/- 0.08) pC.N-1. The fabrication of PEH was completed using just three lithography steps, conventional silicon substrate with full control of the cantilever thickness, in addition to the thickness of the proof mass. As the AlN deposition was conducted at a temperature of approximate to 330 degrees C, the process can be implemented into standard complementary metal oxide semiconductor (CMOS) technology, as well as the CMOS wafer post-processing. The PEH cantilever deflection and efficiency were characterized using both laser interferometry, and a vibration shaker, respectively. This technology could become a core feature for future CMOS-based energy harvesters.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10306 - Optics (including laser optics and quantum optics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2020

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Micromachines

ISSN

2072-666X

e-ISSN

—

Volume of the periodical

11

Issue of the periodical within the volume

2

Country of publishing house

CH - SWITZERLAND

Number of pages

10

Pages from-to

143

UT code for WoS article

000520181500032

EID of the result in the Scopus database

2-s2.0-85081204415