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Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F05%3A00031345" target="_blank" >RIV/68378271:_____/05:00031345 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates

  • Original language description

    In this contribution we describe the characterization and optimization of laser-produced Ge ion fluxes as well as analysis of the direct implantation of these ions into Si and SiO2 substrates at the PALS. The Ge target was irradiated using laser pulses of energy up to 50 J. The maximum depth of implantation of Ge ions was ~450nm.

  • Czech name

    Studium plazmatu produkovaného laserovými pulsy o vysoké energii a nízké intenzitě pro implantaci Ge iontů do Si a SiO2 podložek

  • Czech description

    V tomto příspěvku je charakterizován optimalizovaný tok Ge iontů, získaný ozářením Ge terčíku pulsy jodového laseru PALS o energiích do 50 J, a analyzována přímá implantace těchto iontů do Si a SiO2 podložek. Maximální hloubka implantace Ge iontů byla ~450nm.

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BH - Optics, masers and lasers

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2005

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    PLASMA 2005: Int. Conf. on Research and Applications of Plasmas; 3rd German-Polish Conf.on Plasma Diagnostics for Fusion and Applications; 5th French-Polish Seminar on Thermal Plasma in Space and Labo

  • ISBN

    0094-243X

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    303-306

  • Publisher name

    American Institut of Physics

  • Place of publication

    Melville

  • Event location

    Opole-Turawa

  • Event date

    Sep 6, 2005

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article