Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F05%3A00031345" target="_blank" >RIV/68378271:_____/05:00031345 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Investigation of plasma produced by high-energy low-intesity laser pulses for implantation of Ge ions into Si and SiO2 substrates
Original language description
In this contribution we describe the characterization and optimization of laser-produced Ge ion fluxes as well as analysis of the direct implantation of these ions into Si and SiO2 substrates at the PALS. The Ge target was irradiated using laser pulses of energy up to 50 J. The maximum depth of implantation of Ge ions was ~450nm.
Czech name
Studium plazmatu produkovaného laserovými pulsy o vysoké energii a nízké intenzitě pro implantaci Ge iontů do Si a SiO2 podložek
Czech description
V tomto příspěvku je charakterizován optimalizovaný tok Ge iontů, získaný ozářením Ge terčíku pulsy jodového laseru PALS o energiích do 50 J, a analyzována přímá implantace těchto iontů do Si a SiO2 podložek. Maximální hloubka implantace Ge iontů byla ~450nm.
Classification
Type
D - Article in proceedings
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
PLASMA 2005: Int. Conf. on Research and Applications of Plasmas; 3rd German-Polish Conf.on Plasma Diagnostics for Fusion and Applications; 5th French-Polish Seminar on Thermal Plasma in Space and Labo
ISBN
0094-243X
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
303-306
Publisher name
American Institut of Physics
Place of publication
Melville
Event location
Opole-Turawa
Event date
Sep 6, 2005
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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