Comparative study of electrical properties of nano to polycrystalline diamond films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F08%3A00319787" target="_blank" >RIV/68378271:_____/08:00319787 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Comparative study of electrical properties of nano to polycrystalline diamond films
Original language description
Diamond films were grown by Microwave Plasma (MP) and Hot Filament chemical Vapor Deposition (HF CVD) on Si substrates. The dependence of electrical properties on the film morphology was studied. The surface morphology of grown layers was analyzed by scanning electron microscopy. The different crystallographic character of diamond layers, i.e. either polycrystalline or nanocrystalline, was achieved by using different deposition conditions. Lower-quality diamond films were less sensitive to variation inthe operating conditions. The film break-down voltage and other electrical parameters strongly depend on the morphological character, the grain size and defects in layers.
Czech name
Studium elektrických vlastnosti nano a polykrystalických vrstev diamantu
Czech description
Diamantové vrstvy byli deponováni na Si substráty v mikrovlnném plazmatu a technikou žhaveného vlákna. Vliv morfologie na elektrické vlastnosti byl studován elektrickými měřeními. Rozdílná morfologie vrstev, tj. její polykrystalický nebo nanokrystalickýcharakter, byla dosažena vhodnou volbou procesních parametrů. Průrazné napětí a elektrické vlastnosti diamantových vrstev záviseli na morfologii vrstvy, tj. velikosti zrn a přítomných defektu.
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Physics: Conference Series
ISSN
1742-6588
e-ISSN
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Volume of the periodical
100
Issue of the periodical within the volume
5
Country of publishing house
GB - UNITED KINGDOM
Number of pages
4
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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