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Comparative study of electrical properties of nano to polycrystalline diamond films

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F08%3A00319787" target="_blank" >RIV/68378271:_____/08:00319787 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Comparative study of electrical properties of nano to polycrystalline diamond films

  • Original language description

    Diamond films were grown by Microwave Plasma (MP) and Hot Filament chemical Vapor Deposition (HF CVD) on Si substrates. The dependence of electrical properties on the film morphology was studied. The surface morphology of grown layers was analyzed by scanning electron microscopy. The different crystallographic character of diamond layers, i.e. either polycrystalline or nanocrystalline, was achieved by using different deposition conditions. Lower-quality diamond films were less sensitive to variation inthe operating conditions. The film break-down voltage and other electrical parameters strongly depend on the morphological character, the grain size and defects in layers.

  • Czech name

    Studium elektrických vlastnosti nano a polykrystalických vrstev diamantu

  • Czech description

    Diamantové vrstvy byli deponováni na Si substráty v mikrovlnném plazmatu a technikou žhaveného vlákna. Vliv morfologie na elektrické vlastnosti byl studován elektrickými měřeními. Rozdílná morfologie vrstev, tj. její polykrystalický nebo nanokrystalickýcharakter, byla dosažena vhodnou volbou procesních parametrů. Průrazné napětí a elektrické vlastnosti diamantových vrstev záviseli na morfologii vrstvy, tj. velikosti zrn a přítomných defektu.

Classification

  • Type

    J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2008

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Physics: Conference Series

  • ISSN

    1742-6588

  • e-ISSN

  • Volume of the periodical

    100

  • Issue of the periodical within the volume

    5

  • Country of publishing house

    GB - UNITED KINGDOM

  • Number of pages

    4

  • Pages from-to

  • UT code for WoS article

  • EID of the result in the Scopus database