Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F11%3A00364640" target="_blank" >RIV/68378271:_____/11:00364640 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2010.11.050" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2010.11.050</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2010.11.050" target="_blank" >10.1016/j.surfcoat.2010.11.050</a>

Result language
angličtina
Original language name
Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere
Original language description
A High Power Impulse Magnetron Sputtering System(HiPIMS) equipped with a titanium target 5 cm in diameter has been investigated by means of a time-resolved Langmuir probe and time-resolved ion flux probe. The plasma parameters have been measured in a distance of 70 mm from the target face and below the racetrack. The ion flux at the substrate (placed at the same position as the Langmuir probe) has been determined from the voltage drop across a resistor connected with the planar probe. The planar probe was pulsed at a repetition rate of 50 kHz, duty cycle 50%. The effects of working gas pressure and mean discharge current have been investigated.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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