Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00387342" target="_blank" >RIV/68378271:_____/12:00387342 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.02.039" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2012.02.039</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.02.039" target="_blank" >10.1016/j.surfcoat.2012.02.039</a>
Alternative languages
Result language
angličtina
Original language name
Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films
Original language description
The results of a study of small additions of oxygen and nitrogen on the structure and mechanical properties of nanocrystalline titanium films obtained by magnetron sputtering are presented. The hardness and elastic modulus were determined by nanoindentaion technique. The film composition and structure were investigated by OES, SEM, XRD. Hardness and elastic modulus of the nanocrystalline films with small content of oxygen at (<= 2 at.%) and nitrogen (<= 1 at.%) remained approximately the same as for nanocrystalline films deposited in pure Ar. Significant growth of hardness from similar to 4 to similar to 10 GPa was observed at the increase of oxygen/nitrogen content up to similar to 6 at.%. It was accompanied by reducing grain size from similar to 85 to similar to 20 nm and growth of compressive stress. The obtained results are explained by changing of the film structure and composition.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
206
Issue of the periodical within the volume
17
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
3580-3585
UT code for WoS article
000303644900003
EID of the result in the Scopus database
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