Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H2/CH4/CO2/N2 gas chemistry

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00424202" target="_blank" >RIV/68378271:_____/13:00424202 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H2/CH4/CO2/N2 gas chemistry
Original language description
In this contribution we focused on the detailed study of diamond films grown by pulsed linear antenna microwave plasma chemical vapour deposition from the N2/H2/CH4/CO2 process gas mixture at different concentrations. The changes observed in the plasma chemistry and growth kinetics were discussed.
Czech name
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Czech description
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Project
<a href="/en/project/GBP108%2F12%2FG108" target="_blank" >GBP108/12/G108: Preparation, modification and characterization of materials by radiation</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of 8th Solid State Surfaces and Interfaces
ISBN
978-80-223-3501-0
ISSN
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e-ISSN
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Number of pages
1
Pages from-to
187
Publisher name
Comenius University
Place of publication
Bratislava
Event location
Smolenice
Event date
Nov 25, 2013
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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