Perspectives and challenges in "Diamond-on-GaN" technology
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00424372" target="_blank" >RIV/68378271:_____/13:00424372 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Perspectives and challenges in "Diamond-on-GaN" technology
Original language description
This article deals with growth of diamond thin films on GaN substrates. First, Diamond-on-GaN structures are pointed out as a promising electronic material with variety of applications. From the practical point of view, diamond thin films are shown as anattractive solution to the limited use of monocrystalline diamond substrates. For this purpose, some technological requirements on the diamond thin film growth on GaN substrates are stressed too; i.e. the topics as thermally - induced stresses, aggressive process conditions or growth of diamond films, demand on the low temperature diamond deposit ion, selective area deposition, spontaneous nucleation of diamond, diffusion of carbon atoms, etc. The experimental part of our study focuses on the direct growth of polycrystalline diamond films on AlGaN/GaN high electron mobility transistors (HEMTs) related to aforementioned technological challenges.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies)
ISBN
978-80-971179-2-4
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
37-41
Publisher name
Slovenská vákuová spoločnosť
Place of publication
Bratislava
Event location
Štrbské Pleso
Event date
Oct 10, 2013
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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