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Perspectives and challenges in "Diamond-on-GaN" technology

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00424372" target="_blank" >RIV/68378271:_____/13:00424372 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Perspectives and challenges in "Diamond-on-GaN" technology

  • Original language description

    This article deals with growth of diamond thin films on GaN substrates. First, Diamond-on-GaN structures are pointed out as a promising electronic material with variety of applications. From the practical point of view, diamond thin films are shown as anattractive solution to the limited use of monocrystalline diamond substrates. For this purpose, some technological requirements on the diamond thin film growth on GaN substrates are stressed too; i.e. the topics as thermally - induced stresses, aggressive process conditions or growth of diamond films, demand on the low temperature diamond deposit ion, selective area deposition, spontaneous nucleation of diamond, diffusion of carbon atoms, etc. The experimental part of our study focuses on the direct growth of polycrystalline diamond films on AlGaN/GaN high electron mobility transistors (HEMTs) related to aforementioned technological challenges.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BM - Solid-state physics and magnetism

  • OECD FORD branch

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2013

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies)

  • ISBN

    978-80-971179-2-4

  • ISSN

  • e-ISSN

  • Number of pages

    5

  • Pages from-to

    37-41

  • Publisher name

    Slovenská vákuová spoločnosť

  • Place of publication

    Bratislava

  • Event location

    Štrbské Pleso

  • Event date

    Oct 10, 2013

  • Type of event by nationality

    EUR - Evropská akce

  • UT code for WoS article