The Laser Ablation as a perspective technique for the deposition of metal-silicide nanoparticles in situ embedded in PECVD of Si:H thin films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00450131" target="_blank" >RIV/68378271:_____/15:00450131 - isvavai.cz</a>
Alternative codes found
RIV/67985858:_____/15:00450131 RIV/68407700:21460/15:00241262
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
The Laser Ablation as a perspective technique for the deposition of metal-silicide nanoparticles in situ embedded in PECVD of Si:H thin films
Original language description
In this paper we introduce amorphous hydrogenated silicon thin films (a-Si:H) deposited by PECVD with embedded magnesium silicide (Mg2Si) nanoparticles (NPs) which are created by Reactive Laser Ablation (RLA) of Mg target in low pressure of silane (SiH4). Both techniques are periodically changed in short intervals ? each of the monolayers of Mg2Si NPs is covered by thin a-Si:H film. The physical characteristics of those films are studied not only on high quality optical substrates but in diode structures too. As a final result we introduce the voltage dependence of the electroluminescence of deposited diodes
Czech name
—
Czech description
—

Project
<a href="/en/project/LH12236" target="_blank" >LH12236: Quantum size effect in optoelectronic properties of nanostructures embedded in semiconductor layers.</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)