Characteristics of zirconium and niobium contacts on boron-doped diamond

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00490077" target="_blank" >RIV/68378271:_____/18:00490077 - isvavai.cz</a>

Alternative codes found

RIV/68407700:21460/18:00329697

Result on the web

<a href="http://dx.doi.org/10.1016/j.diamond.2018.02.009" target="_blank" >http://dx.doi.org/10.1016/j.diamond.2018.02.009</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.diamond.2018.02.009" target="_blank" >10.1016/j.diamond.2018.02.009</a>

Result language

angličtina

Original language name

Characteristics of zirconium and niobium contacts on boron-doped diamond

Original language description

Formation of ohmic contacts on boron-doped diamond using zirconium and niobium has been studied in comparison to the commonly used titanium or tantalum contacts. Metal contacts were fabricated using standard micro-fabrication technologies on epitaxial layers with different boron concentrations. Room temperature specific contact resistance was determined using the circular Transmission Line Model after annealing at various temperatures. The specific contact resistance varies considerably with boron concentration and annealing temperature. Zirconium and niobium form ohmic contacts on highly boron-doped diamond after high-temperature annealing with a specific contact resistance comparable to that of titanium and tantalum contacts. Furthermore, we observed zirconium contacts showed better thermal stability upon high-temperature annealing compared to titanium and other metal contacts. These results emphasize the potential of zirconium for the formation of ohmic contacts on boron-doped diamond.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

—

Volume of the periodical

83

Issue of the periodical within the volume

Mar

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

184-189

UT code for WoS article

000430767200025

EID of the result in the Scopus database

2-s2.0-85042370453