Low-resistance ohmic contacts on boron-doped {113} oriented homoepitaxial diamond layers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00556036" target="_blank" >RIV/68378271:_____/22:00556036 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/22:00355201 RIV/68407700:21460/22:00355201
Result on the web
<a href="https://doi.org/10.1016/j.diamond.2021.108797" target="_blank" >https://doi.org/10.1016/j.diamond.2021.108797</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.diamond.2021.108797" target="_blank" >10.1016/j.diamond.2021.108797</a>

Result language
angličtina
Original language name
Low-resistance ohmic contacts on boron-doped {113} oriented homoepitaxial diamond layers
Original language description
Refractory metals (titanium, molybdenum, and zirconium) with a gold overlayer were used to form ohmic contacts on {113}-oriented boron doped diamond epitaxial layers (boron concentration ranging from 1019 to 1021 cm−3). Morphology and thickness of deposited layers were determined by AFM and X-SEM, resistivity, carrier concentration and mobility were determined by Hall measurement. Specific contact resistance RCsp of evaporated Ti/Au, Zr/Au, and Mo/Au contacts was measured using c-TLM structures after different annealing stages at temperatures up to 850 °C. Results show that on layers with {113} orientation it is possible to achieve ohmic contacts of comparable quality as for layers with {100} orientation. For all three metal systems, the lowest values for specific contact resistance reached 1 × 10−6 Ω.cm2. Ti/Au contacts show a stable ohmic behavior over the whole range of annealing temperatures, while Mo/Ti contacts had to be annealed above 500 °C to reduce the Schottky barrier and achieve good ohmic contact on lower B doped layers.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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