Characterization of the Very Low Contact Resistance on Heavily Boron Doped (113) CVD Diamond
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F21%3A00356603" target="_blank" >RIV/68407700:21230/21:00356603 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21460/21:00356603
Result on the web
<a href="https://doi.org/10.37904/nanocon.2021.4320" target="_blank" >https://doi.org/10.37904/nanocon.2021.4320</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2021.4320" target="_blank" >10.37904/nanocon.2021.4320</a>
Alternative languages
Result language
angličtina
Original language name
Characterization of the Very Low Contact Resistance on Heavily Boron Doped (113) CVD Diamond
Original language description
The low resistance of ohmic contacts on diamond layers is important for the fabrication of diamond power electronic devices with fast switching capabilities for future high voltage applications. The low barrier height between the metal and diamond, high level of boron doping and annealing at elevated temperatures are the most critical parameters to reach the lowest contact resistivity. In this work, we report on titanium/gold ohmic contacts prepared on the heavily boron-doped (113) epitaxial diamond layers. The contact resistance has been characterized by the Circular Transmission Line Model (cTLM) structures. We used the analytical model of field enhanced emission, tunneling and the image force influence including Fermi level position dependence on the boron concentration for theoretical Ti/Au contact analysis and the Silvaco TCAD 2D simulation to estimate the measurement error associated with the nonzero metal resistance. We show that the resulting simulation values are consistent with the experimental results.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Nanocon 2021 - ABSTRACTS
ISBN
978-80-88365-00-6
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
47-52
Publisher name
TANGER
Place of publication
Ostrava
Event location
Brno
Event date
Oct 20, 2021
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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