Pseudo-vertical Schottky diode with Ruthenium contacts on (113) boron-doped homoepitaxial diamond layers
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00578139" target="_blank" >RIV/68378271:_____/23:00578139 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/23:00368808
Result on the web
<a href="https://doi.org/10.1002/pssa.202300508" target="_blank" >https://doi.org/10.1002/pssa.202300508</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssa.202300508" target="_blank" >10.1002/pssa.202300508</a>
Alternative languages
Result language
angličtina
Original language name
Pseudo-vertical Schottky diode with Ruthenium contacts on (113) boron-doped homoepitaxial diamond layers
Original language description
Electrical properties of pseudo-vertical Schottky barrier diodes (pVSBDs) pre-pared on (113)–oriented boron-doped diamond (BDD) layers using ruthenium(Ru) for both the ohmic and Schottky contacts are investigated. First, Ru ohmiccontacts are evaporated on homoepitaxial BDD layers with different resistivity,and their specific contact resistance is measured using circular transfer lengthmethod structures after annealing at various temperatures up to 750 °C. Then,pVSBD structures are fabricated on the boron-doped bilayer consisting of a lower,heavily boron-doped layer ensuring an ohmic contact and an upper, lightly dopedlayer providing a rectifying Schottky contact. After necessary mesa etching, both contacts are formed by the Ru evaporation. The results show that Ru forms astable ohmic contact with very low contact resistance (10 5–10 6Ωcm2) whendeposited on BDD layers with metallic conductivity. It also provides anacceptable Schottky contact on low-doped (113) homoepitaxial BDD.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Physica Status Solidi A
ISSN
1862-6300
e-ISSN
1862-6319
Volume of the periodical
220
Issue of the periodical within the volume
23
Country of publishing house
US - UNITED STATES
Number of pages
8
Pages from-to
2300508
UT code for WoS article
001088238900001
EID of the result in the Scopus database
2-s2.0-85174888978