Comparison of ohmic contact formation of titanium and zirconium on boron doped diamond
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00501101" target="_blank" >RIV/68378271:_____/18:00501101 - isvavai.cz</a>
Alternative codes found
RIV/61388955:_____/18:00501101 RIV/68407700:21460/18:00331256
Result on the web
<a href="http://dx.doi.org/10.1557/adv.2018.39" target="_blank" >http://dx.doi.org/10.1557/adv.2018.39</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1557/adv.2018.39" target="_blank" >10.1557/adv.2018.39</a>
Alternative languages
Result language
angličtina
Original language name
Comparison of ohmic contact formation of titanium and zirconium on boron doped diamond
Original language description
With a high affinity to carbon comparable to titanium and an electrically conductive carbide, zirconium has potential to form ohmic contact on boron doped diamond. In this work, formation of ohmic contacts on boron doped diamond using zirconium is studied in comparison to titanium. Boron doped diamond epitaxial layers have been grown by microwave plasma enhanced chemical vapour deposition with various B/C ratio. Circular Transmission Line Model structures were fabricated using standard micro-fabrication technologies. Specific contact resistance of fabricated contacts was determined for different boron concentrations and for various annealing temperatures. Ohmic contacts using zirconium are formed after annealing at 400 °C.n
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
MRS Advances
ISSN
2059-8521
e-ISSN
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Volume of the periodical
3
Issue of the periodical within the volume
33
Country of publishing house
GB - UNITED KINGDOM
Number of pages
5
Pages from-to
1931-1935
UT code for WoS article
000438845800010
EID of the result in the Scopus database
2-s2.0-85049554543