Influence of Different InGaN/(In)GaN Growth Modes on Indium Incorporation and Quality of Layers

Result code in IS VaVaI

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Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Influence of Different InGaN/(In)GaN Growth Modes on Indium Incorporation and Quality of Layers

Original language description

In our work we will show how to significantly increase the In content in QWs without lowering the QW growth temperature. We have studied different growth modes of InGaN/(In)GaN heterostructure while the QW growth parameters (temperature, pressure, flow, etc.) were kept constant. We have only changed parameters during the temperature rise to the barrier growth and parameters during the barrier growth. We have introduced a small TMIn flow immediately after the QW growth and observed not only increased concentration of In in the structure (in both, QW and barrier) but also strong increase of the growth rate (confirmed by SIMS and XRD measurements). We explain this phenomenon by suppression of In desorption during the initial phase of the barrier growth. Photoluminescence spectra of samples with different combinations of (In)GaN QW capping and (In)GaN barriers will be shown and discussed. Luminescent homogeneity of these samples was characterized by PL intensity maps.nn

Czech name

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Czech description

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Type

O - Miscellaneous

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů