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Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00533965" target="_blank" >RIV/68378271:_____/20:00533965 - isvavai.cz</a>

  • Result on the web

    <a href="https://doi.org/10.1116/1.5145292" target="_blank" >https://doi.org/10.1116/1.5145292</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1116/1.5145292" target="_blank" >10.1116/1.5145292</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering

  • Original language description

    The sideways (radial) deposition rate and ionized flux fraction in a high power impulse magnetron sputtering (HiPIMS) discharge are studied and compared to a dc magnetron sputtering (dcMS) discharge, while the magnetic field strength and degree of balancing are varied.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10305 - Fluids and plasma physics (including surface physics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films

  • ISSN

    0734-2101

  • e-ISSN

  • Volume of the periodical

    38

  • Issue of the periodical within the volume

    3

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    11

  • Pages from-to

    1-11

  • UT code for WoS article

    000529407100003

  • EID of the result in the Scopus database

    2-s2.0-85084281981