Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00533967" target="_blank" >RIV/68378271:_____/20:00533967 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1063/1.5140650" target="_blank" >https://doi.org/10.1063/1.5140650</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.5140650" target="_blank" >10.1063/1.5140650</a>
Alternative languages
Result language
angličtina
Original language name
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
Original language description
High power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in argon gas was investigated by time-resolved electrical (Langmuir) probe diagnostics and by time-integrated energy-resolved mass spectrometry. The HiPIMS discharge was operated with a bipolar pulsed power supply.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Physics Letters
ISSN
0003-6951
e-ISSN
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Volume of the periodical
116
Issue of the periodical within the volume
6
Country of publishing house
US - UNITED STATES
Number of pages
4
Pages from-to
1-4
UT code for WoS article
000538749400001
EID of the result in the Scopus database
2-s2.0-85079530666