Time-resolved diagnostics of a bipolar HiPIMS discharge

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00533971" target="_blank" >RIV/68378271:_____/20:00533971 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1063/5.0006425" target="_blank" >https://doi.org/10.1063/5.0006425</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/5.0006425" target="_blank" >10.1063/5.0006425</a>

Result language
angličtina
Original language name
Time-resolved diagnostics of a bipolar HiPIMS discharge
Original language description
Bipolar high power impulse magnetron sputtering (HiPIMS) with a yttrium target is investigated with the help of time-resolved diagnostics. The bipolar HiPIMS discharge is operated with a negative pulse with a width of 100 μs, which is immediately followed by a positive pulse (pulse voltage up to +60 V) with a duration of ~310 μs. The time-resolved floating potential first rises to a large positive voltage of ~55V at the beginning of the positive pulse (+60 V) and after 30 μs drops to ~38 V. It indicates the ignition of a reversed discharge. Further evidence of such a reversed discharge is confirmed by time-resolved mass spectrometry and time-resolved optical emission spectroscopy.
Czech name
—
Czech description
—

Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)