High polarization and wake-up free ferroelectric characteristics in ultrathin Hf0.5Zr0.5O2 devices by control of oxygen-deficient layer
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00553457" target="_blank" >RIV/68378271:_____/22:00553457 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1088/1361-6528/ac3a38" target="_blank" >https://doi.org/10.1088/1361-6528/ac3a38</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6528/ac3a38" target="_blank" >10.1088/1361-6528/ac3a38</a>
Alternative languages
Result language
angličtina
Original language name
High polarization and wake-up free ferroelectric characteristics in ultrathin Hf0.5Zr0.5O2 devices by control of oxygen-deficient layer
Original language description
The formation of an interfacial layer is believed to affect the ferroelectric properties in HfO2 based ferroelectric devices. The atomic layer deposited devices continue suffering from a poor bottom interfacial condition, since the formation of bottom interface is severely affected by atomic layer deposition and annealing process. Herein, the formation of bottom interfacial layer was controlled through deposition of different bottom electrodes (BE) in device structure W/ HZO/BE. The transmission electron microscopy (TEM) and x-ray photoelectron spectroscopy analyses done on devices W/HZO/W and W/HZO/IrOx suggest the strong effect of IrOx in controlling bottom interfacial layer formation while W/HZO/W badly suffers from interfacial layer formation.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Nanotechnology
ISSN
0957-4484
e-ISSN
1361-6528
Volume of the periodical
33
Issue of the periodical within the volume
8
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
085206
UT code for WoS article
000725856400001
EID of the result in the Scopus database
2-s2.0-85121828452