Tailoring pulsed laser deposition of phosphorus doped WOx films from (PO2)4(WO3)4 target by space-resolved optical emission spectroscopy

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00555884" target="_blank" >RIV/68378271:_____/22:00555884 - isvavai.cz</a>
Alternative codes found
RIV/00216208:11310/22:10446914
Result on the web
<a href="https://doi.org/10.1016/j.tsf.2021.139042" target="_blank" >https://doi.org/10.1016/j.tsf.2021.139042</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2021.139042" target="_blank" >10.1016/j.tsf.2021.139042</a>

Result language
angličtina
Original language name
Tailoring pulsed laser deposition of phosphorus doped WOx films from (PO2)4(WO3)4 target by space-resolved optical emission spectroscopy
Original language description
Phosphorus doped WOx films were deposited on fused silica substrates from a target of monophosphate tungsten bronze (PO2)4(WO3)2 m with m = 2. Different conditions of O2 pressures and substrate temperature depositions were performed in parallel to plasma investigations during the depositions step. Changes were observed in the film stoichiometries affecting the film properties while the increase of the O2 pressure. Optical bandgap was shifted from 3.39 eV to 3.86 eV as a function of the deposition pressure from 7.5 Pa to 20 Pa. In situ optical emission spectroscopy was carried out in all the O2 atmosphere conditions.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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