Hybrid HiPIMS + controlled pulsed arc for deposition of hard coatings
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00562105" target="_blank" >RIV/68378271:_____/22:00562105 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2022.128765" target="_blank" >https://doi.org/10.1016/j.surfcoat.2022.128765</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2022.128765" target="_blank" >10.1016/j.surfcoat.2022.128765</a>
Alternative languages
Result language
angličtina
Original language name
Hybrid HiPIMS + controlled pulsed arc for deposition of hard coatings
Original language description
A new hybrid PVD deposition system was developed based on the combination of HiPIMS pulsed glow discharge and pulsed cathodic arc discharge (HiPIMS+ARC). The new hybrid HiPIMS+ARC discharge works with modified pulsed high power supplies which allow the initiation of pulsed arc discharge during HiPIMS pulse at the defined time. The initiated arc during the active part of the HiPIMS pulse is quenched at the end of this active part of the pulse when the magnetron cathode is disconnected from the negative voltage of the power supply. Several modifications with HiPIMS sequence of active pulses with arc were tested as well. The hybrid HiPIMS+ARC was applied for the deposition of ta-C thin films by use of a graphite magnetron target.n
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/FV30177" target="_blank" >FV30177: Research and development of novel pulsed plasma technologies for deposition of advanced thin-film materials</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
446
Issue of the periodical within the volume
Sep
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
128765
UT code for WoS article
000848099900003
EID of the result in the Scopus database
2-s2.0-85135903369