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Ultrafast infrared laser crystallization of amorphous Ge films on glass substrates

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00577936" target="_blank" >RIV/68378271:_____/23:00577936 - isvavai.cz</a>

  • Alternative codes found

    RIV/68407700:21340/23:00370505

  • Result on the web

    <a href="https://hdl.handle.net/11104/0347013" target="_blank" >https://hdl.handle.net/11104/0347013</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.3390/mi14112048" target="_blank" >10.3390/mi14112048</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Ultrafast infrared laser crystallization of amorphous Ge films on glass substrates

  • Original language description

    Amorphous germanium films on nonrefractory glass substrates were annealed by ultrashort near-infrared (1030 nm, 1.4 ps) and mid-infrared (1500 nm, 70 fs) laser pulses. Crystallization of germanium irradiated at a laser energy density (fluence) range from 25 to 400 mJ/cm2 under single-shot and multishot conditions was investigated using Raman spectroscopy. The dependence of the fraction of the crystalline phase on the fluence was obtained for picosecond and femtosecond laser annealing. The regimes of almost complete crystallization of germanium films over the entire thickness were obtained (from the analysis of Raman spectra with excitation of 785 nm laser). The possibility of scanning laser processing is shown, which can be used to create films of micro- and nanocrystalline germanium on flexible substrates.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/EF15_003%2F0000445" target="_blank" >EF15_003/0000445: Advanced designing of functional materials: From mono- to BI- And TRI-chromatic excitation with tailored laser pulses</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2023

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Micromachines

  • ISSN

    2072-666X

  • e-ISSN

    2072-666X

  • Volume of the periodical

    14

  • Issue of the periodical within the volume

    11

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    14

  • Pages from-to

    2048

  • UT code for WoS article

    001113669700001

  • EID of the result in the Scopus database

    2-s2.0-85178109648