Design of Experiments of AlN Reactive Sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00155827" target="_blank" >RIV/68407700:21230/09:00155827 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Design of Experiments of AlN Reactive Sputtering
Original language description
Factor experiments have been used for optimization of a process of reactive sputtering of AlN. Different sputtering conditions were examined and their influence on the thickness of sputtered joints was investigated.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
32nd ISSE 2009 Proceedings
ISBN
978-1-4244-4260-7
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
VUT v Brně, FEI
Place of publication
Brno
Event location
Brno
Event date
May 13, 2009
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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