Study of Dynamic Gas Response of Microwave Plasma Enhanced Chemical Vapor Deposition Systems by Optical Emission Spectroscopy

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F21%3A00356602" target="_blank" >RIV/68407700:21230/21:00356602 - isvavai.cz</a>

Alternative codes found

RIV/68407700:21460/21:00356602

Result on the web

<a href="https://doi.org/10.37904/nanocon.2021.4379" target="_blank" >https://doi.org/10.37904/nanocon.2021.4379</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.37904/nanocon.2021.4379" target="_blank" >10.37904/nanocon.2021.4379</a>

Result language

angličtina

Original language name

Study of Dynamic Gas Response of Microwave Plasma Enhanced Chemical Vapor Deposition Systems by Optical Emission Spectroscopy

Original language description

Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) is widely used for the growth and the study of synthetic doped diamond and its electronic and electrochemical applications. Recent results show the possible enhancement of dopant incorporation in diamond using pulsed gas injection in the reactor. Therefore, understanding the gas dynamic of the MWPECVD reactors is crucial to the optimization of the gas flows and diamond doping. In this work, we present a method to determine the gas dynamic response of a MWPECVD reactor. We determined the dynamic response of injected gas in a NIRIM type and a linear antenna type MWPECVD reactor by recording light emission from a hydrogen plasma during the instantaneous injection of a small fraction of nitrogen using either Optical Emission Spectroscopy (OES) or the combination of a photodiode and an optical band filter. Using linear system theory, we developed a program to determine the dynamic response of the reactor to an arbitrary shaped gas flow input from its pulse response.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

—

Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2021

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Nanocon 2021 - ABSTRACTS

ISBN

978-80-88365-00-6

ISSN

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e-ISSN

—

Number of pages

6

Pages from-to

411-416

Publisher name

TANGER

Place of publication

Ostrava

Event location

Brno

Event date

Oct 20, 2021

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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