Nanoscale imaging using a compact laser plasma EUV source

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F12%3A00204160" target="_blank" >RIV/68407700:21340/12:00204160 - isvavai.cz</a>
Result on the web
<a href="http://proceedings.aip.org/resource/2/apcpcs/1437/1/79_1?isAuthorized=no" target="_blank" >http://proceedings.aip.org/resource/2/apcpcs/1437/1/79_1?isAuthorized=no</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.3703347" target="_blank" >10.1063/1.3703347</a>

Result language
angličtina
Original language name
Nanoscale imaging using a compact laser plasma EUV source
Original language description
High resolution imaging methods and techniques are currently under development. One of them is an extreme ultraviolet (EUV) microscopy, based on Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, emitting quasi-monochromatic radiation at 13.8nm wavelength was used in a desktop EUV transmission microscopy with a spatial (half-pitch) resolution of 50nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented. 2012 American Institute of Physics.
Czech name
—
Czech description
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Project
<a href="/en/project/LA08024" target="_blank" >LA08024: Research in the Frame of the International Center for Dense Magnetized Plasmas - ICDMP</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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