Plasma polymerisation of methylphenylsilane
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F70883521%3A28110%2F05%3A63503788" target="_blank" >RIV/70883521:28110/05:63503788 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26310/05:PU52971
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Plasma polymerisation of methylphenylsilane
Original language description
Microwave electron cyclotron resonance plasma afterglow chemical vapour deposition (MW ECR PA CVD) and radio frequency plasma enhanced CVD (RF PE CVD) of plasma-poly(methylphenylsilane) (p-PMPS) were examined according to plasma composition and resultingthin film properties. Direct mass spectrometry monitoring and gas chromatography and mass spectroscopy (GC MS) of cold-trapped plasma products were used. Deposited samples were measured mainly on luminescence. The low pressure MW ECR plasma creates species for layer growth by a smaller average number of inelastic collisions per origin of monomer molecule. The exploitation of monomer reaches 23% in comparison with RF plasma (5#7%) and the deposition rate is larger (1.5 nm s?1) in comparison with RF plasma (0.2 nm s?1). The inelastic collision rate is primarily more important for growing layers than the power introduced into plasma. The luminescence spectra of both MW and RF samples are compared.
Czech name
Plazmatická polymerizace fenylmethylsilanu
Czech description
CVD depozice poly(methylphenylsilanu) v dohasínajícím plazmatu MW ECR a v RF plazmatu jsou zkoumány z hlediska složení plazmatu a vlastností výsledných vrstev. K analýze bylo použito jednak přímo hmotnostního spektrometru a dale byly s pomocí plynové chromatografie zkoumány produkty plazmochemických reakcí ve vymražených vzorcích.
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
CD - Macromolecular chemistry
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
200
Issue of the periodical within the volume
1-4
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
4
Pages from-to
486-489
UT code for WoS article
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EID of the result in the Scopus database
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