Comparison of the performance of the next generation of optical interferometers

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F12%3A%230000721" target="_blank" >RIV/00177016:_____/12:#0000721 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Comparison of the performance of the next generation of optical interferometers

Popis výsledku v původním jazyce

Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for national metrology institutes to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community thereby supporting the growth in nanotechnology. Several approaches were followed in order to developthe interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers by using an x-ray interferometer to generate traceable reference displacements.

Název v anglickém jazyce

Comparison of the performance of the next generation of optical interferometers

Popis výsledku anglicky

Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for national metrology institutes to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community thereby supporting the growth in nanotechnology. Several approaches were followed in order to developthe interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers by using an x-ray interferometer to generate traceable reference displacements.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

R - Projekt Ramcoveho programu EK

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Metrologia

ISSN

0026-1394

e-ISSN

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Svazek periodika

49

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

13

Strana od-do

455-467

Kód UT WoS článku

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EID výsledku v databázi Scopus

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