Environmental influences on autocollimator-based angle and form metrology

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F19%3AN0000003" target="_blank" >RIV/00177016:_____/19:N0000003 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Environmental influences on autocollimator-based angle and form metrology

Popis výsledku v původním jazyce

Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement. In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy metrology with autocollimators in profilometers. They can cause substantial systematic errors in form measurement, especially in the case of large and strongly curved optical surfaces of high dynamic range. Relative angle and form measuring errors of the order of 1E-4 are to be expected. We characterize environmental influences by extended theoretical and experimental investigations and derive strategies for correcting them. We also discuss the possibility to minimize the contributions of some errors by the application of sophisticated experimental arrangements and methods. This work aims at approaching fundamental limits in autocollimator-based slope and form metrology.

Název v anglickém jazyce

Environmental influences on autocollimator-based angle and form metrology

Popis výsledku anglicky

Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement. In this contribution, we discuss the influences of environmental parameters, such as temperature and air pressure, including their gradients, on high-accuracy metrology with autocollimators in profilometers. They can cause substantial systematic errors in form measurement, especially in the case of large and strongly curved optical surfaces of high dynamic range. Relative angle and form measuring errors of the order of 1E-4 are to be expected. We characterize environmental influences by extended theoretical and experimental investigations and derive strategies for correcting them. We also discuss the possibility to minimize the contributions of some errors by the application of sophisticated experimental arrangements and methods. This work aims at approaching fundamental limits in autocollimator-based slope and form metrology.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/7AX13030" target="_blank" >7AX13030: Angle metrology</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Review of Scientific Instruments

ISSN

0034-6748

e-ISSN

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Svazek periodika

90

Číslo periodika v rámci svazku

2

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

15

Strana od-do

021705

Kód UT WoS článku

000460095300006

EID výsledku v databázi Scopus

2-s2.0-85061641308