Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F20%3AN0000077" target="_blank" >RIV/00177016:_____/20:N0000077 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/20:00114378

Výsledek na webu

<a href="https://www.confer.cz/nanocon/2019/114-study-of-nanostructured-plasma-polymer-thin-films-growth-under-dusty-plasma-conditions" target="_blank" >https://www.confer.cz/nanocon/2019/114-study-of-nanostructured-plasma-polymer-thin-films-growth-under-dusty-plasma-conditions</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.37904/nanocon.2019.8699" target="_blank" >10.37904/nanocon.2019.8699</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions

Popis výsledku v původním jazyce

In the present work plasma-polymer nanocomposite thin films were prepared under dusty plasma conditions in capacitively coupled RF discharges. The main focus was on the study of the formation of the organosilicon plasma polymers and their growth. The plasma polymers were grown heterogeneously in form of polymeric particles arising from the discharge volume which incorporated into the amorphous organosilicon polymeric film growing on the silicon and glass substrates. The created nanocomposite structure had very beneficial influence on the film properties. The films showed very interesting mechanical and surface properties. Variation in deposition conditions enabled us to vary the surface free energy of the films. The mechanical properties of the films were studied using nanoindentation technique and the surface structure was studied using atomic force microscopy. The atomic composition and chemical structure of the films were studied studied using XPS and FTIR techniques. The surface free energy of the films was studied using contact angle measuring techniques.

Název v anglickém jazyce

Study of nanostructured plasma-polymer thin films growth under dusty plasma conditions

Popis výsledku anglicky

In the present work plasma-polymer nanocomposite thin films were prepared under dusty plasma conditions in capacitively coupled RF discharges. The main focus was on the study of the formation of the organosilicon plasma polymers and their growth. The plasma polymers were grown heterogeneously in form of polymeric particles arising from the discharge volume which incorporated into the amorphous organosilicon polymeric film growing on the silicon and glass substrates. The created nanocomposite structure had very beneficial influence on the film properties. The films showed very interesting mechanical and surface properties. Variation in deposition conditions enabled us to vary the surface free energy of the films. The mechanical properties of the films were studied using nanoindentation technique and the surface structure was studied using atomic force microscopy. The atomic composition and chemical structure of the films were studied studied using XPS and FTIR techniques. The surface free energy of the films was studied using contact angle measuring techniques.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Conference Proceedings - NANOCON 2019

ISBN

978-80-87294-95-6

ISSN

2694-930X

e-ISSN

—

Počet stran výsledku

6

Strana od-do

642-647

Název nakladatele

Tanger

Místo vydání

Ostrava

Místo konání akce

Brno, hotel Voroněž

Datum konání akce

16. 10. 2019

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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