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Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Identifikátory výsledku

  • Kód výsledku v IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F21%3AN0000008" target="_blank" >RIV/00177016:_____/21:N0000008 - isvavai.cz</a>

  • Nalezeny alternativní kódy

    RIV/00216224:14310/21:00118706 RIV/00216305:26210/21:PU142115

  • Výsledek na webu

    <a href="https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35" target="_blank" >https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1088/2040-8986/ac1f35" target="_blank" >10.1088/2040-8986/ac1f35</a>

Alternativní jazyky

  • Jazyk výsledku

    angličtina

  • Název v původním jazyce

    Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

  • Popis výsledku v původním jazyce

    The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh–Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.

  • Název v anglickém jazyce

    Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

  • Popis výsledku anglicky

    The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh–Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.

Klasifikace

  • Druh

    J<sub>imp</sub> - Článek v periodiku v databázi Web of Science

  • CEP obor

  • OECD FORD obor

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Návaznosti výsledku

  • Projekt

    Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

  • Návaznosti

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Ostatní

  • Rok uplatnění

    2021

  • Kód důvěrnosti údajů

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Údaje specifické pro druh výsledku

  • Název periodika

    Journal of Optics

  • ISSN

    2040-8978

  • e-ISSN

    2040-8986

  • Svazek periodika

    23

  • Číslo periodika v rámci svazku

    10

  • Stát vydavatele periodika

    GB - Spojené království Velké Británie a Severního Irska

  • Počet stran výsledku

    14

  • Strana od-do

  • Kód UT WoS článku

    000698822800001

  • EID výsledku v databázi Scopus

    2-s2.0-85116895212