Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F21%3APU142115" target="_blank" >RIV/00216305:26210/21:PU142115 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/21:00118706

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35" target="_blank" >https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/2040-8986/ac1f35" target="_blank" >10.1088/2040-8986/ac1f35</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Popis výsledku v původním jazyce

The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh-Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.

Název v anglickém jazyce

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Popis výsledku anglicky

The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh-Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Optics

ISSN

2040-8978

e-ISSN

2040-8986

Svazek periodika

23

Číslo periodika v rámci svazku

10

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

14

Strana od-do

„ 105602“-„ 105602“

Kód UT WoS článku

000698822800001

EID výsledku v databázi Scopus

2-s2.0-85116895212