Setting probing force and scanning speed of fast microprobes for non-destructive roughness and microform measurements

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F21%3AN0000090" target="_blank" >RIV/00177016:_____/21:N0000090 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.ptb.de/empir2018/fileadmin/documents/empir/MicroProbes/Good_Practice_Guide_No_2_MicroProbes_Force_Speed.pdf" target="_blank" >https://www.ptb.de/empir2018/fileadmin/documents/empir/MicroProbes/Good_Practice_Guide_No_2_MicroProbes_Force_Speed.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Setting probing force and scanning speed of fast microprobes for non-destructive roughness and microform measurements

Popis výsledku v původním jazyce

This Good Practice Guide (GPG) was developed during the course of the EMPIR project MicroProbes “Multifunctional ultrafast microprobes for on ‐ the ‐ machine measurements”. Within this project fast piezoresistive silicon microprobes were developed for fast roughness measurements and mechanical property measurements. During fast tactile topography measurements, the inertia of the microprobe cantilever creates dynamic forces which might lead to tip flight and thus measurement errors. To prevent from tip flight, usually the highest possible probing forces are used. These are mainly given by the hardness of the surface to be measured. The Good Practice Guide helps users of microprobes to set the probing force and the maximum scanning speed of their microprobing system for reliable topography and roughness measurements.

Název v anglickém jazyce

Setting probing force and scanning speed of fast microprobes for non-destructive roughness and microform measurements

Popis výsledku anglicky

This Good Practice Guide (GPG) was developed during the course of the EMPIR project MicroProbes “Multifunctional ultrafast microprobes for on ‐ the ‐ machine measurements”. Within this project fast piezoresistive silicon microprobes were developed for fast roughness measurements and mechanical property measurements. During fast tactile topography measurements, the inertia of the microprobe cantilever creates dynamic forces which might lead to tip flight and thus measurement errors. To prevent from tip flight, usually the highest possible probing forces are used. These are mainly given by the hardness of the surface to be measured. The Good Practice Guide helps users of microprobes to set the probing force and the maximum scanning speed of their microprobing system for reliable topography and roughness measurements.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

21100 - Other engineering and technologies

Projekt

<a href="/cs/project/8B18006" target="_blank" >8B18006: Multifunctional ultrafast microprobes for on-the-machine measurements</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů