Residual stress and elastic anisotropy in the Ti-Al-(Si-)N and Cr-Al-(Si-)N nanocomposites deposited by cathodic arc evaporation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F08%3A00206790" target="_blank" >RIV/00216208:11320/08:00206790 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Residual stress and elastic anisotropy in the Ti-Al-(Si-)N and Cr-Al-(Si-)N nanocomposites deposited by cathodic arc evaporation

Popis výsledku v původním jazyce

The elastic anisotropy of the Cr-Al-(Si-)N and Ti-Al-(Si-)N thin film nanocomposites with different aluminium and silicon contents deposited by the cathodic arc evaporation was investigated using complementary X-ray diffraction methods. Glancing angle X-ray diffraction (GAXRD) was employed to get the first information about the anisotropy of the elastic constants. The measurements done on an X-ray diffractometer equipped with an Eulerian cradle were used for calculation of the lattice strain and residual stress using the Crystallite Group Method and for determination of the preferred orientation of crystallites. In most samples, the degree of the elastic anisotropy decreased with increasing aluminium and silicon contents. Still, depending on the transition metal (Cr and/or Ti), different dependences of the elastic anisotropy on the aluminium and silicon contents were observed that could be related to the phase stability regions of the cubic phase in thin film nanocomposites.

Název v anglickém jazyce

Residual stress and elastic anisotropy in the Ti-Al-(Si-)N and Cr-Al-(Si-)N nanocomposites deposited by cathodic arc evaporation

Popis výsledku anglicky

The elastic anisotropy of the Cr-Al-(Si-)N and Ti-Al-(Si-)N thin film nanocomposites with different aluminium and silicon contents deposited by the cathodic arc evaporation was investigated using complementary X-ray diffraction methods. Glancing angle X-ray diffraction (GAXRD) was employed to get the first information about the anisotropy of the elastic constants. The measurements done on an X-ray diffractometer equipped with an Eulerian cradle were used for calculation of the lattice strain and residual stress using the Crystallite Group Method and for determination of the preferred orientation of crystallites. In most samples, the degree of the elastic anisotropy decreased with increasing aluminium and silicon contents. Still, depending on the transition metal (Cr and/or Ti), different dependences of the elastic anisotropy on the aluminium and silicon contents were observed that could be related to the phase stability regions of the cubic phase in thin film nanocomposites.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2008

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Zeitschrift für Kristallographie

ISSN

0044-2968

e-ISSN

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Svazek periodika

27

Číslo periodika v rámci svazku

27

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

8

Strana od-do

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Kód UT WoS článku

000264441800028

EID výsledku v databázi Scopus

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