Flexible hard Al-Si-N films for high temperature operation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F16%3A43930531" target="_blank" >RIV/49777513:23520/16:43930531 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.05.054" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2016.05.054</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.05.054" target="_blank" >10.1016/j.surfcoat.2016.05.054</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Flexible hard Al-Si-N films for high temperature operation

Popis výsledku v původním jazyce

This article reports on flexible hard Al-Si-N films prepared by reactive magnetron sputtering. The structure and mechanical properties of Al-Si-N films were controlled by the content of Si in the film, partial pressure of nitrogen pN2 used in sputtering and the power delivered to the magnetron. The Al-Si-N films with a low (LESS-THAN OR EQUAL TO 10 at.%) Si content and with a high (GREATER-THAN OR EQUAL TO 20 at.%) Si content were prepared. Correlations between the structure, microstructure, mechanical properties and their thermal stability of the Al-Si-N films are analyzed in detail. Thermal stability of Al-Si-N films was assessed by thermal annealing in air and water vapor up to annealing temperature Ta = 1200 oC. It is shown that (1) the increase of Si content in the Al-Si-N film leads to the change of its crystalline structure from polycrystalline to X-ray amorphous and (2) the flexible hard Al-Si-N films with high (i) hardness H ALMOST EQUAL TO 20 GPa, (ii) ratio H/E* GREATER-THAN OR EQUAL TO 0.1, and (iii) elastic recovery We GREATER-THAN OR EQUAL TO 60% exhibit enhanced resistance to cracking and (3) the thermal stability of Al-Si-N films with a high (GREATER-THAN OR EQUAL TO 20 at.%) Si content achieves up to Ta ALMOST EQUAL TO 1200 oC in air and up to Ta ALMOST EQUAL TO 800 oC in water vapor. Conditions under which the flexible hard Al-Si-N films with enhanced resistance to cracking and high thermal stability can be prepared are described in detail.

Název v anglickém jazyce

Flexible hard Al-Si-N films for high temperature operation

Popis výsledku anglicky

This article reports on flexible hard Al-Si-N films prepared by reactive magnetron sputtering. The structure and mechanical properties of Al-Si-N films were controlled by the content of Si in the film, partial pressure of nitrogen pN2 used in sputtering and the power delivered to the magnetron. The Al-Si-N films with a low (LESS-THAN OR EQUAL TO 10 at.%) Si content and with a high (GREATER-THAN OR EQUAL TO 20 at.%) Si content were prepared. Correlations between the structure, microstructure, mechanical properties and their thermal stability of the Al-Si-N films are analyzed in detail. Thermal stability of Al-Si-N films was assessed by thermal annealing in air and water vapor up to annealing temperature Ta = 1200 oC. It is shown that (1) the increase of Si content in the Al-Si-N film leads to the change of its crystalline structure from polycrystalline to X-ray amorphous and (2) the flexible hard Al-Si-N films with high (i) hardness H ALMOST EQUAL TO 20 GPa, (ii) ratio H/E* GREATER-THAN OR EQUAL TO 0.1, and (iii) elastic recovery We GREATER-THAN OR EQUAL TO 60% exhibit enhanced resistance to cracking and (3) the thermal stability of Al-Si-N films with a high (GREATER-THAN OR EQUAL TO 20 at.%) Si content achieves up to Ta ALMOST EQUAL TO 1200 oC in air and up to Ta ALMOST EQUAL TO 800 oC in water vapor. Conditions under which the flexible hard Al-Si-N films with enhanced resistance to cracking and high thermal stability can be prepared are described in detail.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JJ - Ostatní materiály

OECD FORD obor

—

Projekt

<a href="/cs/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Tvrdé nanokompozitní vrstvy se zvýšenou houževnatostí a unikátními vlastnostmi</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

307

Číslo periodika v rámci svazku

15 December 2016

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

7

Strana od-do

1112-1118

Kód UT WoS článku

000390721800018

EID výsledku v databázi Scopus

2-s2.0-84971657616