Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime

Popis výsledku v původním jazyce

The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen with the pulse width 100 mis (duty cycle 10%) and the amplitude of the pulses was 400 V. The average discharge current reached about 250 mA. To obtain better stability of the discharge a 3.8 kOmega resistor was connected across the pulse switch. Consequently, there was a weak continuous dc discharge on the background of the pulsed discharge. From the probe characteristics the plasma and floating potential, electron density and electron temperature have been evaluated. Theirdependences on the pressure (in the range of several Pa) and on the radial distance from the central axis of the system are presented. Temporal resolution of the measurements is 0.5 mis.

Název v anglickém jazyce

Langmuir Probe Diagnostics of DC Hollow Cathode Discharge in 1 kHz Pulsed Regime

Popis výsledku anglicky

The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen with the pulse width 100 mis (duty cycle 10%) and the amplitude of the pulses was 400 V. The average discharge current reached about 250 mA. To obtain better stability of the discharge a 3.8 kOmega resistor was connected across the pulse switch. Consequently, there was a weak continuous dc discharge on the background of the pulsed discharge. From the probe characteristics the plasma and floating potential, electron density and electron temperature have been evaluated. Theirdependences on the pressure (in the range of several Pa) and on the radial distance from the central axis of the system are presented. Temporal resolution of the measurements is 0.5 mis.

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2009

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS´09 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media

ISBN

978-80-7378-102-6

ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

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Název nakladatele

Matfyzpress

Místo vydání

Prague

Místo konání akce

Prague

Datum konání akce

1. 1. 2009

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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