Computational Study of Sheath Structure in the Presence of Magnetic Field

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F12%3A10133152" target="_blank" >RIV/00216208:11320/12:10133152 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_215_f2_Ibehej.pdf" target="_blank" >http://www.mff.cuni.cz/veda/konference/wds/proc/pdf12/WDS12_215_f2_Ibehej.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Computational Study of Sheath Structure in the Presence of Magnetic Field

Popis výsledku v původním jazyce

The results of 2D particle and 3D particle/fluid hybrid simulations are presented. We investigated a plasma sheath formed near substrates of different shapes and showed the influence of magnetic field on the sheath structure and particle fluxes to the substrate. The studied solids were a cylindrical and a planar probe and a grooved planar substrate. The object of interest was idealized three-component plasma containing electrons and one species of positive and negative ions. This composition simulates frequently used plasma mixtures containing electronegative gas (e.g. oxygen or chlorine) and rare gas (e.g. argon). We used a simplified plasma composition to show general properties of electronegative plasmas interacting with solids. The effects of the presence of negative ions were investigated together with the effects of magnetic field. The simulations of plasma-solid interaction are useful not only for many plasma material treatment applications but also for an analysis of plasma pro

Název v anglickém jazyce

Computational Study of Sheath Structure in the Presence of Magnetic Field

Popis výsledku anglicky

The results of 2D particle and 3D particle/fluid hybrid simulations are presented. We investigated a plasma sheath formed near substrates of different shapes and showed the influence of magnetic field on the sheath structure and particle fluxes to the substrate. The studied solids were a cylindrical and a planar probe and a grooved planar substrate. The object of interest was idealized three-component plasma containing electrons and one species of positive and negative ions. This composition simulates frequently used plasma mixtures containing electronegative gas (e.g. oxygen or chlorine) and rare gas (e.g. argon). We used a simplified plasma composition to show general properties of electronegative plasmas interacting with solids. The effects of the presence of negative ions were investigated together with the effects of magnetic field. The simulations of plasma-solid interaction are useful not only for many plasma material treatment applications but also for an analysis of plasma pro

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS'12 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media

ISBN

978-80-7378-225-2

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

87-92

Název nakladatele

Matfyzpress

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

29. 5. 2012

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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