Effect of the stoichiometry of niobium oxide on the resistive switching of Nb2O5 based metal-insulator-metal stacks

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F15%3A10321551" target="_blank" >RIV/00216208:11320/15:10321551 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.elspec.2015.04.013" target="_blank" >http://dx.doi.org/10.1016/j.elspec.2015.04.013</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.elspec.2015.04.013" target="_blank" >10.1016/j.elspec.2015.04.013</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of the stoichiometry of niobium oxide on the resistive switching of Nb2O5 based metal-insulator-metal stacks

Popis výsledku v původním jazyce

The oxygen concentration profiles, which develop at the interfaces between niobium pentoxide and the Al or Pt electrode in a metal insulator metal stack, were investigated by means of the X-ray and electron energy loss spectroscopies in a scanning transmission electron microscope with high resolution. The contact between Al and Nb2O5 was found to facilitate diffusion of oxygen from Nb2O5 to the Al electrode and to support the formation of a thin aluminum oxide layer at the Nb2O5/Al interface. In contrast, almost no diffusion of oxygen from Nb2O5 was observed at the Nb2O5/Pt interface. Different extent of the oxygen diffusion correlates with the observed differences in the resistive switching of the Pt/Nb2O5/Al and Pt/Nb2O5/Pt stacks. (C) 2015 ElsevierB.V. All rights reserved.

Název v anglickém jazyce

Effect of the stoichiometry of niobium oxide on the resistive switching of Nb2O5 based metal-insulator-metal stacks

Popis výsledku anglicky

The oxygen concentration profiles, which develop at the interfaces between niobium pentoxide and the Al or Pt electrode in a metal insulator metal stack, were investigated by means of the X-ray and electron energy loss spectroscopies in a scanning transmission electron microscope with high resolution. The contact between Al and Nb2O5 was found to facilitate diffusion of oxygen from Nb2O5 to the Al electrode and to support the formation of a thin aluminum oxide layer at the Nb2O5/Al interface. In contrast, almost no diffusion of oxygen from Nb2O5 was observed at the Nb2O5/Pt interface. Different extent of the oxygen diffusion correlates with the observed differences in the resistive switching of the Pt/Nb2O5/Al and Pt/Nb2O5/Pt stacks. (C) 2015 ElsevierB.V. All rights reserved.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

—

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Electron Spectroscopy and Related Phenomena

ISSN

0368-2048

e-ISSN

—

Svazek periodika

202

Číslo periodika v rámci svazku

-

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

6

Strana od-do

122-127

Kód UT WoS článku

000357904600020

EID výsledku v databázi Scopus

2-s2.0-84934934532