Formation of hollow microneedles on silicon surface by doughnut- shaped laser pulses using single- and multi-shot irradiation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F21%3A10432114" target="_blank" >RIV/00216208:11320/21:10432114 - isvavai.cz</a>

Výsledek na webu

<a href="https://altconference.org/documents/proceedings/Book%20of%20Abstracts%20ALT_2021.pdf" target="_blank" >https://altconference.org/documents/proceedings/Book%20of%20Abstracts%20ALT_2021.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Formation of hollow microneedles on silicon surface by doughnut- shaped laser pulses using single- and multi-shot irradiation

Popis výsledku v původním jazyce

Our work deals with the formation of tubular-like structures and hollow-core microneedles on the surface of monocrystalline silicon using ultrashort laser pulses. Highly deterministic surface processing is ensured by single-shot ablative modification of the sample surface as well as the multi-shot regime was used to study and modify the final structure shape. Both regimes were operated at laser fluences above the single-shot laser-induced damage threshold by a doughnut-shaped femtosecond laser pulses with duration of 35 fs (Astrella from Coherent, 800 nm wavelength). At laser fluences slightly above the ablation threshold, well reproducible tubular structures are formed whose height increases with fluence culminating with closing the structure on the top (fig. 1). Upon multi-pulsed irradiation, the height of the needle structures can be increased as compared to those produced by single pulses but, at certain number of pulses, ablation causes the entire structure to collapse. The origin of observed surface structures was discussed with respect to thermodynamics, hydrodynamics, and material stress theory.

Název v anglickém jazyce

Formation of hollow microneedles on silicon surface by doughnut- shaped laser pulses using single- and multi-shot irradiation

Popis výsledku anglicky

Our work deals with the formation of tubular-like structures and hollow-core microneedles on the surface of monocrystalline silicon using ultrashort laser pulses. Highly deterministic surface processing is ensured by single-shot ablative modification of the sample surface as well as the multi-shot regime was used to study and modify the final structure shape. Both regimes were operated at laser fluences above the single-shot laser-induced damage threshold by a doughnut-shaped femtosecond laser pulses with duration of 35 fs (Astrella from Coherent, 800 nm wavelength). At laser fluences slightly above the ablation threshold, well reproducible tubular structures are formed whose height increases with fluence culminating with closing the structure on the top (fig. 1). Upon multi-pulsed irradiation, the height of the needle structures can be increased as compared to those produced by single pulses but, at certain number of pulses, ablation causes the entire structure to collapse. The origin of observed surface structures was discussed with respect to thermodynamics, hydrodynamics, and material stress theory.

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

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Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů