Formation of tubular structures and microneedles on silicon surface by doughnut-shaped ultrashort laser pulses

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00557026" target="_blank" >RIV/68378271:_____/22:00557026 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216208:11320/22:10447260

Výsledek na webu

<a href="https://doi.org/10.1016/j.apsusc.2022.153228" target="_blank" >https://doi.org/10.1016/j.apsusc.2022.153228</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2022.153228" target="_blank" >10.1016/j.apsusc.2022.153228</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Formation of tubular structures and microneedles on silicon surface by doughnut-shaped ultrashort laser pulses

Popis výsledku v původním jazyce

Highly deterministic surface processing is ensured by single-shot ablative modification of the sample surface using radially polarized doughnut-shaped laser pulses with duration of 70 fs.Under such conditions,well reproducible tubular structures are formed whose height is rising with increasing fluence,culminating by closing the structure on the top with formation of a microneedle with a cavity in its base.Upon multi-pulsed irradiation,the height of the needle structures can further increase as compared to those produced by single pulses and top part of the structure is flattened.At a certain number of pulses,melting and ablation cause collapsing the entire structure.The mechanisms responsible for creating the tubular and needle structures are discussed based on the careful analysis of the experimental observations.The generated silicon microtubes and needles can find applications in various fields.

Název v anglickém jazyce

Formation of tubular structures and microneedles on silicon surface by doughnut-shaped ultrashort laser pulses

Popis výsledku anglicky

Highly deterministic surface processing is ensured by single-shot ablative modification of the sample surface using radially polarized doughnut-shaped laser pulses with duration of 70 fs.Under such conditions,well reproducible tubular structures are formed whose height is rising with increasing fluence,culminating by closing the structure on the top with formation of a microneedle with a cavity in its base.Upon multi-pulsed irradiation,the height of the needle structures can further increase as compared to those produced by single pulses and top part of the structure is flattened.At a certain number of pulses,melting and ablation cause collapsing the entire structure.The mechanisms responsible for creating the tubular and needle structures are discussed based on the careful analysis of the experimental observations.The generated silicon microtubes and needles can find applications in various fields.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/EF15_003%2F0000445" target="_blank" >EF15_003/0000445: Pokročilá příprava funkčních materiálů: Od mono k bi- a tri-chromatické excitaci s použitím tvarovaných laserových pulsů</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

1873-5584

Svazek periodika

592

Číslo periodika v rámci svazku

Aug.

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

6

Strana od-do

153228

Kód UT WoS článku

000796161600003

EID výsledku v databázi Scopus

2-s2.0-85128174117