Diagnostics of Reactive HiPIMS Discharge Assisted by ECWR Plasma

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F21%3A10440104" target="_blank" >RIV/00216208:11320/21:10440104 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_17_f2_Kapran.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf21/WDS21_17_f2_Kapran.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Diagnostics of Reactive HiPIMS Discharge Assisted by ECWR Plasma

Popis výsledku v původním jazyce

This study is focused on the investigation of plasma parameters in reactive HiPIMS with iron target in Ar+O2 gas mixture for two different configurations - conventional HiPIMS and hybrid system HiPIMS assisted with the electron cyclotron wave resonance (ECWR) discharge. In reactive HiPIMS+ECWR configuration a discharge could be maintained at working gas pressure lower than typical for conventional reactive HiPIMS. Due to reduced pressure the plasma parameters such as electron temperature and ion flux density differ from common HiPIMS. The measurements were performed using an iron target in Ar/O2 atmosphere. Plasma parameters have been studied as a function of varying oxygen flow rate during magnetron sputtering process. The diagnostics of plasma was performed by means of RF planar ion flux probe at the position of the substrate.

Název v anglickém jazyce

Diagnostics of Reactive HiPIMS Discharge Assisted by ECWR Plasma

Popis výsledku anglicky

This study is focused on the investigation of plasma parameters in reactive HiPIMS with iron target in Ar+O2 gas mixture for two different configurations - conventional HiPIMS and hybrid system HiPIMS assisted with the electron cyclotron wave resonance (ECWR) discharge. In reactive HiPIMS+ECWR configuration a discharge could be maintained at working gas pressure lower than typical for conventional reactive HiPIMS. Due to reduced pressure the plasma parameters such as electron temperature and ion flux density differ from common HiPIMS. The measurements were performed using an iron target in Ar/O2 atmosphere. Plasma parameters have been studied as a function of varying oxygen flow rate during magnetron sputtering process. The diagnostics of plasma was performed by means of RF planar ion flux probe at the position of the substrate.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS&apos;21 Proceedings of Contributed Papers — Physics

ISBN

978-80-7378-455-3

ISSN

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e-ISSN

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Počet stran výsledku

7

Strana od-do

120-126

Název nakladatele

Matfyzpress

Místo vydání

Praha

Místo konání akce

Praha/ZOOM

Datum konání akce

15. 6. 2021

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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