The Correlation of Plasma Characteristics to the Deposition Rate of Plasma Polymerized Methyl Methacrylate Thin Films in an Inductively Coupled Plasma System
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10446942" target="_blank" >RIV/00216208:11320/22:10446942 - isvavai.cz</a>
Nalezeny alternativní kódy
RIV/00216224:14310/22:00127714
Výsledek na webu
<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=xE1T8MqB4y" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=xE1T8MqB4y</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/coatings12071014" target="_blank" >10.3390/coatings12071014</a>
Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
The Correlation of Plasma Characteristics to the Deposition Rate of Plasma Polymerized Methyl Methacrylate Thin Films in an Inductively Coupled Plasma System
Popis výsledku v původním jazyce
A plasma system attached with one internal coil (for generating inductively coupled plasma) and two sputtering carbon targets was set up to deposit PP-MMA (plasma polymerized methyl methacrylate) thin films. PP-MMA was used as a model material in the present study. In the experiment, the working pressure and Ar/MMA flow ratio were varied, which resulted in the change in plasma conditions as well as the deposition rates. The optical emission spectroscopy (OES) method was applied to identify the presence of the excited species related to the fragmented monomer. In addition, the electron temperature and electron density were determined using the modified Boltzmann plot and line-ratio method, according to the measured OES spectra. The deposition rate of the PMMA film was then correlated with the determined plasma characteristics. To determine the vibrational modes of the deposited PP-MMA films, Fourier transformed infrared spectrometry (FTIR) was used. The highest deposition rate of PP-MMA could be obtained with the optimized working pressure and Ar/MMA volume ratio. This could be related to the plasma characteristics that contribute to the fragmentation of the monomer in the plasma.
Název v anglickém jazyce
The Correlation of Plasma Characteristics to the Deposition Rate of Plasma Polymerized Methyl Methacrylate Thin Films in an Inductively Coupled Plasma System
Popis výsledku anglicky
A plasma system attached with one internal coil (for generating inductively coupled plasma) and two sputtering carbon targets was set up to deposit PP-MMA (plasma polymerized methyl methacrylate) thin films. PP-MMA was used as a model material in the present study. In the experiment, the working pressure and Ar/MMA flow ratio were varied, which resulted in the change in plasma conditions as well as the deposition rates. The optical emission spectroscopy (OES) method was applied to identify the presence of the excited species related to the fragmented monomer. In addition, the electron temperature and electron density were determined using the modified Boltzmann plot and line-ratio method, according to the measured OES spectra. The deposition rate of the PMMA film was then correlated with the determined plasma characteristics. To determine the vibrational modes of the deposited PP-MMA films, Fourier transformed infrared spectrometry (FTIR) was used. The highest deposition rate of PP-MMA could be obtained with the optimized working pressure and Ar/MMA volume ratio. This could be related to the plasma characteristics that contribute to the fragmentation of the monomer in the plasma.
Klasifikace
Druh
J<sub>imp</sub> - Článek v periodiku v databázi Web of Science
CEP obor
—
OECD FORD obor
10305 - Fluids and plasma physics (including surface physics)
Návaznosti výsledku
Projekt
—
Návaznosti
S - Specificky vyzkum na vysokych skolach
Ostatní
Rok uplatnění
2022
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název periodika
Coatings [online]
ISSN
2079-6412
e-ISSN
2079-6412
Svazek periodika
12
Číslo periodika v rámci svazku
7
Stát vydavatele periodika
CH - Švýcarská konfederace
Počet stran výsledku
14
Strana od-do
1014
Kód UT WoS článku
000833768500001
EID výsledku v databázi Scopus
2-s2.0-85136421729