Atmospheric Pressure Microwave Plasma Jet for Organic Thin Film Deposition

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F20%3APU137772" target="_blank" >RIV/00216305:26310/20:PU137772 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mdpi.com/2073-4360/12/2/354" target="_blank" >https://www.mdpi.com/2073-4360/12/2/354</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/polym12020354" target="_blank" >10.3390/polym12020354</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Atmospheric Pressure Microwave Plasma Jet for Organic Thin Film Deposition

Popis výsledku v původním jazyce

In this work, the potential of a microwave (MW)‐induced atmospheric pressure plasma jet (APPJ) in film deposition of styrene and methyl methacrylate (MMA) precursors is investigated. Plasma properties during the deposition and resultant coating characteristics are studied. Optical emission spectroscopy (OES) results indicate a higher degree of monomer dissociation in the APPJ with increasing power and a carrier gas flow rate of up to 250 standard cubic centimeters per minute (sccm). Computational fluid dynamic (CFD) simulations demonstrate non‐uniform monomer distribution near the substrate and the dependency of the deposition area on the monomercontaining gas flow rate. A non‐homogeneous surface morphology and topography of the deposited coatings is also observed using atomic force microscopy (AFM) and SEM. Coating chemical analysis and wettability are studied by XPS and water contact angle (WCA), respectively. A lower monomer flow rate was found to result in a higher C–O/C–C ratio and a higher wettability of the deposited coatings.

Název v anglickém jazyce

Atmospheric Pressure Microwave Plasma Jet for Organic Thin Film Deposition

Popis výsledku anglicky

In this work, the potential of a microwave (MW)‐induced atmospheric pressure plasma jet (APPJ) in film deposition of styrene and methyl methacrylate (MMA) precursors is investigated. Plasma properties during the deposition and resultant coating characteristics are studied. Optical emission spectroscopy (OES) results indicate a higher degree of monomer dissociation in the APPJ with increasing power and a carrier gas flow rate of up to 250 standard cubic centimeters per minute (sccm). Computational fluid dynamic (CFD) simulations demonstrate non‐uniform monomer distribution near the substrate and the dependency of the deposition area on the monomercontaining gas flow rate. A non‐homogeneous surface morphology and topography of the deposited coatings is also observed using atomic force microscopy (AFM) and SEM. Coating chemical analysis and wettability are studied by XPS and water contact angle (WCA), respectively. A lower monomer flow rate was found to result in a higher C–O/C–C ratio and a higher wettability of the deposited coatings.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Polymers

ISSN

2073-4360

e-ISSN

—

Svazek periodika

12

Číslo periodika v rámci svazku

2

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

23

Strana od-do

1-23

Kód UT WoS článku

000519849800104

EID výsledku v databázi Scopus

—