Computational fluid dynamics predicts the nanoparticle transport in gas aggregation cluster sources

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10447811" target="_blank" >RIV/00216208:11320/22:10447811 - isvavai.cz</a>

Výsledek na webu

<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=_G7GRNA-uO" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=_G7GRNA-uO</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/ac8c4e" target="_blank" >10.1088/1361-6463/ac8c4e</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Computational fluid dynamics predicts the nanoparticle transport in gas aggregation cluster sources

Popis výsledku v původním jazyce

In a typical sputter-based gas aggregation cluster source (GAS), nanoparticles (NPs) are created from supersaturated vapours of the target material. The NPs then escape from the source with the expanding gas through an exit orifice. The carrier gas flow profile is one of the most critical parameters, which strongly affects the NP losses on the walls and determines the efficiency of the NP transport to the substrate. In this work, computational fluid dynamics (CFD) simulations are performed to understand the flow of the carrier gas inside the aggregation chamber. We focus on the impact of the inlet and outlet geometry on the carrier gas flow and, therefore, on the NP transportation. Two types of GAS with either a conventional planar magnetron or a cylindrical magnetron are considered. In the planar configuration, the working gas inlet is from behind the magnetron, and the gas flows around the target towards the orifice along the system axis, which may cause some vertices. The situation is even more critical for the cylindrical magnetron, where the gas inlet position and geometry have a drastic influence on the gas flow. Brownian diffusion is found to prevail for NPs smaller than 5 nm, regardless of the gas flow. This leads to their losses on the walls. Larger NPs experience a stronger drag force from the carrier gas flow, which should exceed 10 m s(-1) to prevent loss of NPs on the walls and keep NP transport efficient. Therefore, the CFD simulations help to visualise the motion of the NPs and optimise the geometry of the GAS for future applications.

Název v anglickém jazyce

Computational fluid dynamics predicts the nanoparticle transport in gas aggregation cluster sources

Popis výsledku anglicky

In a typical sputter-based gas aggregation cluster source (GAS), nanoparticles (NPs) are created from supersaturated vapours of the target material. The NPs then escape from the source with the expanding gas through an exit orifice. The carrier gas flow profile is one of the most critical parameters, which strongly affects the NP losses on the walls and determines the efficiency of the NP transport to the substrate. In this work, computational fluid dynamics (CFD) simulations are performed to understand the flow of the carrier gas inside the aggregation chamber. We focus on the impact of the inlet and outlet geometry on the carrier gas flow and, therefore, on the NP transportation. Two types of GAS with either a conventional planar magnetron or a cylindrical magnetron are considered. In the planar configuration, the working gas inlet is from behind the magnetron, and the gas flows around the target towards the orifice along the system axis, which may cause some vertices. The situation is even more critical for the cylindrical magnetron, where the gas inlet position and geometry have a drastic influence on the gas flow. Brownian diffusion is found to prevail for NPs smaller than 5 nm, regardless of the gas flow. This leads to their losses on the walls. Larger NPs experience a stronger drag force from the carrier gas flow, which should exceed 10 m s(-1) to prevent loss of NPs on the walls and keep NP transport efficient. Therefore, the CFD simulations help to visualise the motion of the NPs and optimise the geometry of the GAS for future applications.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

<a href="/cs/project/GA21-12828S" target="_blank" >GA21-12828S: Plazmatem podpořená syntéza nanokapalin na bázi kapalných polymerů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Physics D - Applied Physics

ISSN

0022-3727

e-ISSN

1361-6463

Svazek periodika

55

Číslo periodika v rámci svazku

44

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

12

Strana od-do

445203

Kód UT WoS článku

000852039600001

EID výsledku v databázi Scopus

2-s2.0-85138441701